Carbon-MEMS architectures for 3D microbatteries Conference

Wang, CL, Taherabadi, L, Jia, GY et al. (2004). Carbon-MEMS architectures for 3D microbatteries . SMART BIOMEDICAL AND PHYSIOLOGICAL SENSOR TECHNOLOGY XI, 5455 295-302. 10.1117/12.548755

cited authors

  • Wang, CL; Taherabadi, L; Jia, GY; Kassegne, S; Zoval, J; Madou, M

sustainable development goals

authors

date/time interval

  • April 29, 2004 -

publication date

  • January 1, 2004

webpage

published in

keywords

  • C-MEMS
  • ION RECHARGEABLE BATTERIES
  • Li intercalation
  • Materials Science
  • Materials Science, Multidisciplinary
  • Optics
  • PHOTORESIST
  • Physical Sciences
  • Science & Technology
  • Technology
  • microbattery
  • photoresist
  • pyrolysis
  • simulation

Location

  • Strasbourg, FRANCE

Digital Object Identifier (DOI)

International Standard Book Number (ISBN) 10

Conference

  • Conference on MEMS, MOEMS and Micromachining

publisher

  • SPIE-INT SOC OPTICAL ENGINEERING

start page

  • 295

end page

  • 302

volume

  • 5455