MEMS, sensors and nanotechnology. More specifically, MEMS for superconducting passive microwave devices. Fabrication and experimental study of structure, composition, electrical properties of thin films, including HTSC-films, for MEMS, microwave and sensor applications. Experimental research in the fields of field electron, ion, desorption microscopy and spectroscopy, time-of-flight atom probe with the emphasis on the investigations of thermo-field phenomena on atomic level, desorption-adsorption and condensation of gases, metals, semiconductors, and HTSC on metal sub-nanometer radius tip surfaces.