Atomic Layer Deposition Tool for High Power Density and Reliability with Nanoscale Devices

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Atomic Layer Deposition Tool for High Power Density and Reliability with Nanoscale Devices Grant

Atomic Layer Deposition Tool for High Power Density and Reliability with Nanoscale Devices .

date/time interval

August 1, 2022 - July 31, 2023

awarded by

Army Research Office

administered by

Biomedical Engineering

sponsor award ID

w911NF-22-1-0147

contributor

Pala, Nezih Co-Principal Investigator
Pavlidis, Dimitrios Co-Principal Investigator
Pozdin, Vladimir Co-Principal Investigator
Pulugurtha, Markondeyaraj Principal Investigator
Wang, Chunlei (Peggy) Co-Principal Investigator