Recent advances in design and fabrication of on-chip micro-supercapacitors Conference

Beidaghi, Majid, Wang, Chunlei. (2012). Recent advances in design and fabrication of on-chip micro-supercapacitors . SMART BIOMEDICAL AND PHYSIOLOGICAL SENSOR TECHNOLOGY XI, 8377 10.1117/12.920819

keywords

  • CNT
  • Carbon-microelectomechanical systems (C-MEMS)
  • DEVICES
  • DOUBLE-LAYER
  • Engineering
  • Engineering, Electrical & Electronic
  • FILMS
  • GRAPHENE
  • Graphene
  • MEMS
  • Materials Science
  • Materials Science, Multidisciplinary
  • Micro-supercapacitor
  • On-chip micro-power
  • Optics
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Location

  • Baltimore, MD

Digital Object Identifier (DOI)

Conference

  • Conference on Energy Harvesting and Storage - Materials, Devices, and Applications III

publisher

  • SPIE-INT SOC OPTICAL ENGINEERING

volume

  • 8377