Design, fabrication, and evaluation of on-chip micro-supercapacitors Conference

Beidaghi, Majid, Chen, Wei, Wang, Chunlei. (2011). Design, fabrication, and evaluation of on-chip micro-supercapacitors . SMART BIOMEDICAL AND PHYSIOLOGICAL SENSOR TECHNOLOGY XI, 8035 10.1117/12.884350

Open Access

keywords

  • CARBON
  • Carbon-microelectomechanical systems (C-MEMS)
  • Energy & Fuels
  • Engineering
  • Engineering, Electrical & Electronic
  • Micro-supercapacitor
  • NANOTUBES
  • On-chip micro-power
  • Optics
  • Physical Sciences
  • Science & Technology
  • Technology

Location

  • Orlando, FL

Digital Object Identifier (DOI)

Conference

  • Conference on Energy Harvesting and Storage - Materials, Devices, and Applications II

publisher

  • SPIE-INT SOC OPTICAL ENGINEERING

volume

  • 8035