Wafer-scale transfer of nanoimprinted patterns into silicon substrates Article

Hubbard, G, Abbott, SJ, Chen, Q et al. (2009). Wafer-scale transfer of nanoimprinted patterns into silicon substrates . PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 41(6), 1118-1121. 10.1016/j.physe.2008.08.014

cited authors

  • Hubbard, G; Abbott, SJ; Chen, Q; Allsopp, DWE; Wang, WN; Bowen, CR; Stevens, R; Šatka, A; Haško, D; Uherek, F; Kováč, J

authors

publication date

  • May 1, 2009

published in

keywords

  • 40 Engineering
  • 4016 Materials Engineering

Digital Object Identifier (DOI)

publisher

  • Elsevier

start page

  • 1118

end page

  • 1121

volume

  • 41

issue

  • 6