CMOS compatible 3-D flow and thermal sensors in SOI technology Conference

Andre, N, Iker, F, Jorez, S et al. (2005). CMOS compatible 3-D flow and thermal sensors in SOI technology . 2016 IEEE SENSORS, 553-556.

cited authors

  • Andre, N; Iker, F; Jorez, S; Raskin, JP

authors

date/time interval

  • October 31, 2005 -

publication date

  • January 1, 2005

published in

keywords

  • Instruments & Instrumentation
  • Remote Sensing
  • Science & Technology
  • Technology

Location

  • CA, Irvine

International Standard Book Number (ISBN) 10

Conference

  • 4th IEEE Conference on Sensors

publisher

  • IEEE

start page

  • 553

end page

  • 556