3-D self-assembled SOI MEMS:: An example of multiphysics simulation Conference

Mendez, C, Louis, C, Paquay, S et al. (2006). 3-D self-assembled SOI MEMS:: An example of multiphysics simulation . 31-+.

cited authors

  • Mendez, C; Louis, C; Paquay, S; De Vincenzo, P; Klapka, I; Rochus, V; Iker, F; Andre, N; Raskin, J-P

authors

date/time interval

  • April 26, 2006 -

publication date

  • January 1, 2006

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • Engineering, Mechanical
  • Science & Technology
  • Technology

Location

  • ITALY, Stresa

International Standard Book Number (ISBN) 13

Conference

  • Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

publisher

  • TIMA LABORATORY

start page

  • 31

end page

  • +