New internal stress driven on-chip micromachines for extracting mechanical properties of thin films Conference

Fabregue, D, Andre, N, Pardoen, T et al. (2006). New internal stress driven on-chip micromachines for extracting mechanical properties of thin films . 189-+.

cited authors

  • Fabregue, D; Andre, N; Pardoen, T; Raskin, J-P

authors

date/time interval

  • April 26, 2006 -

publication date

  • January 1, 2006

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • Engineering, Mechanical
  • Science & Technology
  • Technology

Location

  • ITALY, Stresa

International Standard Book Number (ISBN) 13

Conference

  • Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

publisher

  • TIMA LABORATORY

start page

  • 189

end page

  • +