Low complexity testing micromachines revealing size-dependent mechanical properties of thin Al films Conference

Raskin, J-P, Fabregue, D, Andre, N et al. (2007). Low complexity testing micromachines revealing size-dependent mechanical properties of thin Al films .

cited authors

  • Raskin, J-P; Fabregue, D; Andre, N; Coulombier, M; Pardoen, T

authors

date/time interval

  • June 10, 2007 -

publication date

  • January 1, 2007

keywords

  • ACTUATORS
  • Engineering
  • Engineering, Electrical & Electronic
  • Instruments & Instrumentation
  • MEMS
  • Nanoscience & Nanotechnology
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • mechanical properties testing
  • plastic deformation
  • thin films

Location

  • FRANCE, Lyon

International Standard Book Number (ISBN) 13

Conference

  • 14th International Conference on Solid-State Sensors, Actuators and Microsystems/21st European Conference on Solid-State Transducers

publisher

  • IEEE