Bulk and surface micromachined MEMS in thin film SOI technology Conference

Raskin, J-P, Iker, F, Andre, N et al. (2007). Bulk and surface micromachined MEMS in thin film SOI technology . ELECTROCHIMICA ACTA, 52(8), 2850-2861. 10.1016/j.electacta.2006.09.021

cited authors

  • Raskin, J-P; Iker, F; Andre, N; Olbrechts, B; Pardoen, T; Flandre, D

authors

date/time interval

  • April 17, 2006 -

publication date

  • February 10, 2007

published in

keywords

  • DESIGN
  • Electrochemistry
  • FABRICATION
  • MEMS
  • MOS technology
  • Physical Sciences
  • SIMOX
  • Science & Technology
  • integrated sensors
  • micromachining techniques
  • silicon-on-insulator technology

Location

  • SINGAPORE, Singapore

Digital Object Identifier (DOI)

Conference

  • 4th Spring Meeting of the ISE

publisher

  • PERGAMON-ELSEVIER SCIENCE LTD

start page

  • 2850

end page

  • 2861

volume

  • 52

issue

  • 8