Microfabrication-based nanomechanical laboratory for testing the ductility of submicron aluminium films Conference

Andre, N, Coulombier, M, De Longueville, V et al. (2007). Microfabrication-based nanomechanical laboratory for testing the ductility of submicron aluminium films . MICROELECTRONIC ENGINEERING, 84(11), 2714-2718. 10.1016/j.mee.2007.05.039

International Collaboration

cited authors

  • Andre, N; Coulombier, M; De Longueville, V; Fabregue, D; Gets, T; Gravier, S; Pardoen, T; Raskin, J-P

authors

date/time interval

  • March 4, 2007 -

publication date

  • November 1, 2007

published in

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • FRACTURE
  • GOLD
  • Nanoscience & Nanotechnology
  • Optics
  • Physical Sciences
  • Physics
  • Physics, Applied
  • SCALE
  • STRAIN
  • STRENGTH
  • Science & Technology
  • Science & Technology - Other Topics
  • THIN-FILMS
  • Technology
  • fracture
  • nanomechanical testing
  • reliability
  • strain

Location

  • BELGIUM, Bruges

Digital Object Identifier (DOI)

Conference

  • 16th European Workshop on Materials for Advanced Metallization

publisher

  • ELSEVIER

start page

  • 2714

end page

  • 2718

volume

  • 84

issue

  • 11