Ultra Low Power flow-to-frequency SOI MEMS transducer Conference

Andre, N, Rue, B, Van Vynckt, D et al. (2010). Ultra Low Power flow-to-frequency SOI MEMS transducer . Procedia Engineering, 5 540-543. 10.1016/j.proeng.2010.09.166

Open Access

cited authors

  • Andre, N; Rue, B; Van Vynckt, D; Francis, LA; Flandre, D; Raskin, J-P

authors

date/time interval

  • September 5, 2010 -

publication date

  • January 1, 2010

published in

keywords

  • CMOS
  • Chemistry
  • Chemistry, Analytical
  • Engineering
  • Engineering, Electrical & Electronic
  • Materials Science
  • Materials Science, Multidisciplinary
  • Nanoscience & Nanotechnology
  • Physical Sciences
  • SENSORS
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • Thin Films
  • Ultra Low Power

Digital Object Identifier (DOI)

start page

  • 540

end page

  • 543

volume

  • 5