Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology Article

Andre, Nicolas, Rue, Bertrand, Scheen, Gilles et al. (2014). Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology . SENSORS AND ACTUATORS A-PHYSICAL, 206 67-74. 10.1016/j.sna.2013.11.017

cited authors

  • Andre, Nicolas; Rue, Bertrand; Scheen, Gilles; Flandre, Denis; Francis, Laurent A; Raskin, Jean-Pierre

authors

publication date

  • February 1, 2014

published in

keywords

  • CMOS-MEMS
  • Capacitive flow sensor
  • Engineering
  • Engineering, Electrical & Electronic
  • Finite element simulation
  • Instruments & Instrumentation
  • Microfabrication
  • Modeling
  • Monolithic integration
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 67

end page

  • 74

volume

  • 206