A Highly Selective MEMS Transducer for Hydrogen Sensing Based on Stress Modification in Palladium Thin Films Conference

Walewyns, Thomas, Emmerechts, Carl, Gerard, Pierre et al. (2015). A Highly Selective MEMS Transducer for Hydrogen Sensing Based on Stress Modification in Palladium Thin Films . 902-905.

cited authors

  • Walewyns, Thomas; Emmerechts, Carl; Gerard, Pierre; Andre, Nicolas; Francis, Laurent A

sustainable development goals

authors

date/time interval

  • November 1, 2015 -

publication date

  • January 1, 2015

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • HYDRIDING KINETICS
  • Instruments & Instrumentation
  • MEMS
  • Science & Technology
  • Technology
  • functionnalization
  • gas sensor
  • hydrogen
  • microsystem
  • palladium
  • stress
  • thin films
  • ultra-low power

Location

  • SOUTH KOREA, Busan

Conference

  • 2015 IEEE SENSORS

publisher

  • IEEE

start page

  • 902

end page

  • 905