New Universal Figure of Merit for Embedded Si Piezoresistive Pressure Sensors Article

Delhaye, Thibault P, Andre, Nicolas, Francis, Laurent A et al. (2021). New Universal Figure of Merit for Embedded Si Piezoresistive Pressure Sensors . IEEE SENSORS JOURNAL, 21(1), 213-221. 10.1109/JSEN.2020.3013017

Open Access

cited authors

  • Delhaye, Thibault P; Andre, Nicolas; Francis, Laurent A; Flandre, Denis

authors

publication date

  • January 1, 2021

published in

keywords

  • DESIGN
  • DIAPHRAGM
  • Engineering
  • Engineering, Electrical & Electronic
  • FABRICATION
  • HIGH-SENSITIVITY
  • Instruments & Instrumentation
  • MEMS
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Piezoresistance
  • Piezoresistive pressure sensor
  • Pressure sensors
  • Resistors
  • Science & Technology
  • Sensitivity
  • Silicon
  • Stress
  • THIN-FILM
  • Technology
  • figure of merit

Digital Object Identifier (DOI)

publisher

  • IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

start page

  • 213

end page

  • 221

volume

  • 21

issue

  • 1