Electromechanical Measurements and Modeling of a High-Performance Small-Area Ultra-Thin SOI MEMS Piezoresistive Pressure Sensor Article

Zeng, Xi, Andre, Nicolas, Masarweh, Eleonore et al. (2025). Electromechanical Measurements and Modeling of a High-Performance Small-Area Ultra-Thin SOI MEMS Piezoresistive Pressure Sensor . IEEE Transactions on Instrumentation and Measurement, 74 10.1109/TIM.2025.3566836

Open Access

cited authors

  • Zeng, Xi; Andre, Nicolas; Masarweh, Eleonore; Bonfanti, Ottilie; Flandre, Denis

authors

publication date

  • January 1, 2025

published in

keywords

  • Comprehensive modeling
  • Electric variables measurement
  • Engineering
  • Engineering, Electrical & Electronic
  • FABRICATION
  • HIGH LINEARITY
  • HIGH-SENSITIVITY
  • Instruments & Instrumentation
  • Piezoresistance
  • Piezoresistive devices
  • Pressure measurement
  • Pressure sensors
  • Science & Technology
  • Semiconductor device measurement
  • Sensitivity
  • Sensors
  • Silicon
  • Technology
  • Temperature measurement
  • electrical measurement
  • microelectromechanical system (MEMS)
  • piezoresistive pressure sensor
  • silicon-on-insulator (SOI) technology
  • topographic measurement

Digital Object Identifier (DOI)

volume

  • 74