Thermal balance of tungsten monocrystalline nanoparticles in high pressure magnetron discharges
Article
Arnas, C, Chami, A, Couëdel, L et al. (2019). Thermal balance of tungsten monocrystalline nanoparticles in high pressure magnetron discharges
. 26(5), 10.1063/1.5095932
Arnas, C, Chami, A, Couëdel, L et al. (2019). Thermal balance of tungsten monocrystalline nanoparticles in high pressure magnetron discharges
. 26(5), 10.1063/1.5095932
Nanoparticles are produced in sputtering magnetron discharges operating with a tungsten cathode at an argon pressure of 30 Pa. Structure analyses show that they are of core-shell type. The core is a monocrystal mainly in the metastable beta-tungsten phase, and the shell is made of tungsten oxide. The origin of the metastable phase is attributed to the presence of residual oxygen in the device. Since this phase transforms into the stable alpha-tungsten phase by annealing, a standard model on the thermal balance of nanoparticles was used to find the temperature that they can reach under the considered experimental conditions. It is shown that this temperature is significantly higher than the gas one but not high enough to transform the monocrystalline metastable beta-phase during the plasma process.
