QUANTUM-CHEMICAL STUDIES OF THE MECHANISM OF CHLORINE DESORPTION BY MOLECULAR-HYDROGEN DURING VAPOR-PHASE EPITAXY (VPE) OF GALLIUM-ARSENIDE IN THE CHLORIDE PROCESS Article

SCHWETLICK, S, SEIFERT, W, REINHOLD, J et al. (1989). QUANTUM-CHEMICAL STUDIES OF THE MECHANISM OF CHLORINE DESORPTION BY MOLECULAR-HYDROGEN DURING VAPOR-PHASE EPITAXY (VPE) OF GALLIUM-ARSENIDE IN THE CHLORIDE PROCESS . 270(1), 177-189.

cited authors

  • SCHWETLICK, S; SEIFERT, W; REINHOLD, J; BUTTER, E

authors

publication date

  • January 1, 1989

keywords

  • Chemistry
  • Chemistry, Physical
  • Physical Sciences
  • Science & Technology

publisher

  • AKADEMISCHE VERLAGSGESELLSCH GEEST & PORTIG

start page

  • 177

end page

  • 189

volume

  • 270

issue

  • 1