FABRICATION AND CHARACTERIZATION OF 3D MICRO-PLASMA FIELD EFFECT TRANSISTORS Conference

Chowdhury, Faisal K, Zhang, Yuying, Tabib-Azar, M. (2013). FABRICATION AND CHARACTERIZATION OF 3D MICRO-PLASMA FIELD EFFECT TRANSISTORS . 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 669-672.

cited authors

  • Chowdhury, Faisal K; Zhang, Yuying; Tabib-Azar, M

authors

date/time interval

  • January 20, 2013 -

publication date

  • January 1, 2013

published in

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • Nanoscience & Nanotechnology
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology

Location

  • TAIWAN, Taipei

Conference

  • 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

publisher

  • IEEE

start page

  • 669

end page

  • 672