Interaction, transformation and toxicity assessment of particles and additives used in the semiconducting industry Article

Dumitrescu, Eduard, Karunaratne, Dinusha P, Babu, SV et al. (2018). Interaction, transformation and toxicity assessment of particles and additives used in the semiconducting industry . CHEMOSPHERE, 192 178-185. 10.1016/j.chemosphere.2017.10.138

Open Access

cited authors

  • Dumitrescu, Eduard; Karunaratne, Dinusha P; Babu, SV; Wallace, Kenneth N; Andreescu, Silvana

sustainable development goals

authors

publication date

  • February 1, 2018

published in

keywords

  • CERIUM OXIDE NANOPARTICLES
  • CHEMICAL-MECHANICAL PLANARIZATION
  • COPPER
  • Chemical additive
  • Chemical mechanical planarization
  • ENGINEERED NANOMATERIALS
  • Environmental Sciences
  • Environmental Sciences & Ecology
  • GALLIUM-ARSENIDE
  • HYDROGEN-PEROXIDE
  • Interaction
  • Life Sciences & Biomedicine
  • Metal oxide particle
  • POLISHING WASTE-WATER
  • RISK-ASSESSMENT
  • SILICA NANOPARTICLES
  • Science & Technology
  • Toxicity
  • ZEBRAFISH
  • Zebrafish embryo

Digital Object Identifier (DOI)

publisher

  • PERGAMON-ELSEVIER SCIENCE LTD

start page

  • 178

end page

  • 185

volume

  • 192