Practical approach to determining n, k, and d of a growing film with an in situ ellipsometer Conference

Savrda, Steve, Himel, Marc D, Guenther, Karl H et al. (1990). Practical approach to determining n, k, and d of a growing film with an in situ ellipsometer . thcc2. 10.1364/oam.1990.thcc2

cited authors

  • Savrda, Steve; Himel, Marc D; Guenther, Karl H; Urban, Frank K

authors

publication date

  • January 1, 1990

keywords

  • 40 Engineering
  • 4016 Materials Engineering

Digital Object Identifier (DOI)

Conference

  • Optical Society of America Annual Meeting

publisher

  • Optica Publishing Group

start page

  • thcc2