Practical approach to determining n, k, and d of a growing film with an in situ ellipsometer
Conference
Savrda, Steve, Himel, Marc D, Guenther, Karl H et al. (1990). Practical approach to determining n, k, and d of a growing film with an in situ ellipsometer
. thcc2. 10.1364/oam.1990.thcc2
Savrda, Steve, Himel, Marc D, Guenther, Karl H et al. (1990). Practical approach to determining n, k, and d of a growing film with an in situ ellipsometer
. thcc2. 10.1364/oam.1990.thcc2