Laser fabrication of crystalline silicon nanoresonators from an amorphous film for low-loss all-dielectric nanophotonics
Preprint
Dmitriev, PA, Makarov, SV, Milichko, VA et al. (2015). Laser fabrication of crystalline silicon nanoresonators from an amorphous film for low-loss all-dielectric nanophotonics
. 10.48550/arxiv.1512.03977
Dmitriev, PA, Makarov, SV, Milichko, VA et al. (2015). Laser fabrication of crystalline silicon nanoresonators from an amorphous film for low-loss all-dielectric nanophotonics
. 10.48550/arxiv.1512.03977