Laser fabrication of crystalline silicon nanoresonators from an amorphous film for low-loss all-dielectric nanophotonics
Article
Dmitriev, PA, Makarov, SV, Milichko, VA et al. (2016). Laser fabrication of crystalline silicon nanoresonators from an amorphous film for low-loss all-dielectric nanophotonics
. NANOSCALE, 8(9), 5043-5048. 10.1039/c5nr06742a
Dmitriev, PA, Makarov, SV, Milichko, VA et al. (2016). Laser fabrication of crystalline silicon nanoresonators from an amorphous film for low-loss all-dielectric nanophotonics
. NANOSCALE, 8(9), 5043-5048. 10.1039/c5nr06742a