Test standard for light, electron & microwave microscopy to enable robotic processes
Conference
Haenssler, OC, Kostopoulos, A, Doundoulakis, G et al. (2017). Test standard for light, electron & microwave microscopy to enable robotic processes
. 10.1109/MARSS.2017.8001907
Haenssler, OC, Kostopoulos, A, Doundoulakis, G et al. (2017). Test standard for light, electron & microwave microscopy to enable robotic processes
. 10.1109/MARSS.2017.8001907
We report on a test standard for different microscopic techniques combined onto one substrate. The patterns of the test standard are recognizable by image processing routines to provide robotic navigation inside Scanning Electron Microscopes. Here it can be used for high-resolution and astigmatism testing. In the center of this standard is a pattern of three different micro capacitance values. This enables high frequency calibration with a Vector Network Analyzer (VNA), one core element of Scanning Microwave Microscopes.
