Surface Treatment of GaAs and its Application in New Components for Communication Systems. Article

Pavlidis, D, Hartnagel, HL. (1980). Surface Treatment of GaAs and its Application in New Components for Communication Systems. . Nachrichten Elektronik, 34(3), 77-80.

cited authors

  • Pavlidis, D; Hartnagel, HL

abstract

  • Efforts towards GaAs surface passivation have led to the development of various insulator formation techniques including electrolytic and gas plasma anodic growth, and chemical vapor deposition methods. These methods are described together with their possible applications to field-effect-transistor (MOSFET-MESFET) fabrication and performance improvement, solar cell efficiency increase, charge-coupled, optoelectronic and memory device manufacture.

authors

publication date

  • January 1, 1980

published in

start page

  • 77

end page

  • 80

volume

  • 34

issue

  • 3