Dehé, A, Hartnagel, HL, Pavlidis, D
et al. (1996). Properties of InGaAs/InP thermoelectric and surface bulk micromachined infrared sensors
.
APPLIED PHYSICS LETTERS, 69(20), 3039-3041. 10.1063/1.116832
Dehé, A, Hartnagel, HL, Pavlidis, D et al. (1996). Properties of InGaAs/InP thermoelectric and surface bulk micromachined infrared sensors
. APPLIED PHYSICS LETTERS, 69(20), 3039-3041. 10.1063/1.116832