Electrical conditioning of diamond-like carbon films for the formation of coated field emission cathodes Article

Semenenko, M, Okrepka, G, Yilmazoglu, O et al. (2010). Electrical conditioning of diamond-like carbon films for the formation of coated field emission cathodes . APPLIED SURFACE SCIENCE, 257(2), 388-392. 10.1016/j.apsusc.2010.06.089

cited authors

  • Semenenko, M; Okrepka, G; Yilmazoglu, O; Hartnagel, HL; Pavlidis, D

abstract

  • Diamond-like carbon (DLC) films deposited on different substrates by plasma enhanced chemical vapour deposition were investigated. Bonding states and film quality were characterized by FT-IR spectroscopy. The influence of the power of plasma and the deposition time on the sp 2 /sp 3 ratio as well as the concentration of CH n bonds was studied. The influence of sp 2 /sp 3 ratio on the formation process of conducting channels in diamond-like carbon films as a result of electrical breakdown was determined. Reproducible increase of diamond-like carbon film conductivity, with initial sp 2 /sp 3 ratio larger than 0.16, was observed after electrical breakdown. © 2010 Elsevier B.V.

publication date

  • November 1, 2010

published in

Digital Object Identifier (DOI)

start page

  • 388

end page

  • 392

volume

  • 257

issue

  • 2