Design and maskless fabrication of ultrathin suspended membranes of GaN Article

Tiginyanu, IM, Popa, V, Stevens-Kalceff, MA et al. (2012). Design and maskless fabrication of ultrathin suspended membranes of GaN . PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 6(4), 148-150. 10.1002/pssr.201206020

cited authors

  • Tiginyanu, IM; Popa, V; Stevens-Kalceff, MA; Gerthsen, D; Brenner, P; Pavlidis, D

abstract

  • We report the maskless fabrication of ultrathin suspended GaN membranes designed by focused ion beam treatment of the GaN epilayer surface with subsequent photoelectrochemical etching. This technological approach allows the fabrication of ultrathin membranes, as well as supporting micro/nanocolumns in a controlled fashion. The analysis of the spatial and spectral distribution of microcathodoluminescence demonstrates that the membranes exhibit mainly yellow luminescence. These results pave the way for the fabrication of ultrathin suspended GaN membranes for MEMS/NEMS applications. © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

publication date

  • April 1, 2012

Digital Object Identifier (DOI)

start page

  • 148

end page

  • 150

volume

  • 6

issue

  • 4