Design and maskless fabrication of ultrathin suspended membranes of GaN
Article
Tiginyanu, IM, Popa, V, Stevens-Kalceff, MA et al. (2012). Design and maskless fabrication of ultrathin suspended membranes of GaN
. PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 6(4), 148-150. 10.1002/pssr.201206020
Tiginyanu, IM, Popa, V, Stevens-Kalceff, MA et al. (2012). Design and maskless fabrication of ultrathin suspended membranes of GaN
. PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 6(4), 148-150. 10.1002/pssr.201206020