Microstructure and electrical property of tantalum oxynitride thin films prepared using high-power impulse reactive magnetron sputtering Article

Lee, Ping-Yuan, Lin, Cheng-Xian, Lee, Ying-Chieh. (2020). Microstructure and electrical property of tantalum oxynitride thin films prepared using high-power impulse reactive magnetron sputtering . Japanese Journal of Applied Physics, 59(11), 116502. 10.35848/1347-4065/abc0ae

cited authors

  • Lee, Ping-Yuan; Lin, Cheng-Xian; Lee, Ying-Chieh

authors

publication date

  • November 1, 2020

published in

keywords

  • 40 Engineering
  • 4016 Materials Engineering

Digital Object Identifier (DOI)

start page

  • 116502

volume

  • 59

issue

  • 11