Lee, Ping-Yuan, Lin, Cheng-Xian, Lee, Ying-Chieh. (2020). Microstructure and electrical property of tantalum oxynitride thin films prepared using high-power impulse reactive magnetron sputtering
.
JAPANESE JOURNAL OF APPLIED PHYSICS, 59(11), 116502. 10.35848/1347-4065/abc0ae
Lee, Ping-Yuan, Lin, Cheng-Xian, Lee, Ying-Chieh. (2020). Microstructure and electrical property of tantalum oxynitride thin films prepared using high-power impulse reactive magnetron sputtering
. JAPANESE JOURNAL OF APPLIED PHYSICS, 59(11), 116502. 10.35848/1347-4065/abc0ae