Kaushik, A, Kahn, H, Heuer, AH. (2005). Wafer-level mechanical characterization of silicon nitride MEMS
.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 14(2), 359-367. 10.1109/JMEMS.2004.839315
Kaushik, A, Kahn, H, Heuer, AH. (2005). Wafer-level mechanical characterization of silicon nitride MEMS
. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 14(2), 359-367. 10.1109/JMEMS.2004.839315