Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding
Conference
Li, G, Sun, PC, Fainman, Y et al. (2000). Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding
. Proceedings of SPIE - The International Society for Optical Engineering, 4101
Li, G, Sun, PC, Fainman, Y et al. (2000). Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding
. Proceedings of SPIE - The International Society for Optical Engineering, 4101
An interference microscope based on a wavelength-to-depth encoding technique is presented. The wavelength-to-depth encoding is realized by using a diffractive lens and wavelength tuning. The coherence degree of the interference fields versus wavelength is analyzed. A depth discrimination of 0.71 μm is obtained with 0.90 NA objective lenses. Experimental results of a four-level grating measurement are presented with results are comparable to those obtained with a Dektak profilometer and the same interference microscope using mechanical depth-scanning. The system is promising for fast, noncontact, high-resolution three-dimensional imaging.
