Exploring the limits of low cost, organics-compatible high-k ceramic thin-films for embedded decoupling applications Conference

Balaraman, D, Raj, PM, Abothu, R et al. (2005). Exploring the limits of low cost, organics-compatible high-k ceramic thin-films for embedded decoupling applications . 2 1215-1221.

cited authors

  • Balaraman, D; Raj, PM; Abothu, R; Bhattacharya, S; Sacks, M; Lance, M; Meyer, H; Swaminathan, M; Tummala, R

authors

abstract

  • This paper presents four organic-compatible thin film processing techniques for embedding capacitors into organic PWBs. Hydrothermal synthesis allows integration of pure nano-grained barium titanate films with capacitance density of about 1 μF/cm 2. Sol-gel and RF-sputtering in conjunction with a foil transfer process can be used to integrate a variety of perovskite thin films with the capacitance in the range of 200-400 nF/cm 2. Thermal oxidation of titanium foil also emerges as a viable process for integrating capacitance of 100s of nF using a foil transfer process. The dielectric properties of the films synthesized by these techniques as a function of various process parameters are presented. Observed dielectric properties like dielectric constant, leakage current and breakdown strengths have been correlated to structural defects and stoichiometry of the films. © 2005 IEEE.

publication date

  • September 19, 2005

start page

  • 1215

end page

  • 1221

volume

  • 2