Integrating solution-derived 3D PZT structures on Si mems platform for RF and biomedical applications Conference

Raj, P Markondeya, Abothu, Isaac Robin, Abdolvand, Reza et al. (2006). Integrating solution-derived 3D PZT structures on Si mems platform for RF and biomedical applications . 122-122.

cited authors

  • Raj, P Markondeya; Abothu, Isaac Robin; Abdolvand, Reza; Ayazi, Farrokh; Tummala, Rao

authors

date/time interval

  • March 15, 2006 -

publication date

  • January 1, 2006

keywords

  • Materials Science
  • Materials Science, Multidisciplinary
  • Science & Technology
  • Technology

Location

  • GA, Atlanta

International Standard Book Number (ISBN) 13

Conference

  • 11th International Symposium on Advanced Packaging Materials - Processes, Properties and Interface

publisher

  • IEEE

start page

  • 122

end page

  • 122