Integrating solution-derived 3D PZT structures on Si mems platform for RF and biomedical applications
Conference
Raj, PM, Abothu, IR, Abdolvand, R et al. (2007). Integrating solution-derived 3D PZT structures on Si mems platform for RF and biomedical applications
. 2007 122.
Raj, PM, Abothu, IR, Abdolvand, R et al. (2007). Integrating solution-derived 3D PZT structures on Si mems platform for RF and biomedical applications
. 2007 122.