Delamination issues in integration of highly filled polymer-ceramic nanocomposite films on MCM - L compatible substrates
Conference
Raj, PM, Windlass, H, Shinotani, KI et al. (2000). Delamination issues in integration of highly filled polymer-ceramic nanocomposite films on MCM - L compatible substrates
. 1681-1685.
Raj, PM, Windlass, H, Shinotani, KI et al. (2000). Delamination issues in integration of highly filled polymer-ceramic nanocomposite films on MCM - L compatible substrates
. 1681-1685.
An overview is given on the investigation of the origin of delamination problem. In particular, the role of epoxy characterization is highlighted. A failure mechanism is proposed from the correlation between epoxy cure and the delamination during etch treatment.