MEMS composite structures for tunable capacitors and IC-package nano interconnects Conference

Aggarwal, AO, Naeli, K, Raj, PM et al. (2004). MEMS composite structures for tunable capacitors and IC-package nano interconnects . Proceedings - Electronic Components and Technology Conference, 835-842. 10.1109/ECTC.2004.1319434

cited authors

  • Aggarwal, AO; Naeli, K; Raj, PM; Ayazi, F; Bhattacharya, S; Tummala, RR

authors

date/time interval

  • February 3, 2004 -

publication date

  • January 1, 2004

published in

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

International Standard Book Number (ISBN) 10

start page

  • 835

end page

  • 842