Infusing inorganics into the subsurface of polymer redistribution layer dielectrics for improved adhesion to metal interconnects
Conference
Dwarakanath, Shreya, Raj, Pulugurtha Markondeya, Leng, Collen Z et al. (2017). Infusing inorganics into the subsurface of polymer redistribution layer dielectrics for improved adhesion to metal interconnects
. 150-155. 10.1109/ECTC.2017.277
Dwarakanath, Shreya, Raj, Pulugurtha Markondeya, Leng, Collen Z et al. (2017). Infusing inorganics into the subsurface of polymer redistribution layer dielectrics for improved adhesion to metal interconnects
. 150-155. 10.1109/ECTC.2017.277