Partially ionized beam deposition of parylene Article

Khabari, A, Urban, FK. (2005). Partially ionized beam deposition of parylene . JOURNAL OF NON-CRYSTALLINE SOLIDS, 351(43-45), 3536-3541. 10.1016/j.jnoncrysol.2005.08.027

keywords

  • Materials Science
  • Materials Science, Ceramics
  • Materials Science, Multidisciplinary
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

publisher

  • ELSEVIER

start page

  • 3536

end page

  • 3541

volume

  • 351

issue

  • 43-45