Partially ionized beam deposition of parylene Article

Khabari, A, Urban, FK. (2005). Partially ionized beam deposition of parylene . Journal of Non-Crystalline Solids, 351(43-45), 3536-3541. 10.1016/j.jnoncrysol.2005.08.027

cited authors

  • Khabari, A; Urban, FK

sustainable development goals

authors

publication date

  • November 1, 2005

published in

keywords

  • Materials Science
  • Materials Science, Ceramics
  • Materials Science, Multidisciplinary
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

start page

  • 3536

end page

  • 3541

volume

  • 351

issue

  • 43-45