CLUSTER SIZE IN IONIZED CLUSTER BEAM DEPOSITION Conference

URBAN, FK, BERNSTEIN, AI. (1990). CLUSTER SIZE IN IONIZED CLUSTER BEAM DEPOSITION . 1323 8-18. 10.1117/12.22368

cited authors

  • URBAN, FK; BERNSTEIN, AI

authors

date/time interval

  • July 9, 1990 -

publication date

  • January 1, 1990

keywords

  • Energy & Fuels
  • Engineering
  • Engineering, Multidisciplinary
  • Optics
  • Physical Sciences
  • Science & Technology
  • Technology

Location

  • CA, SAN DIEGO

Digital Object Identifier (DOI)

International Standard Book Number (ISBN) 10

Conference

  • CONF ON OPTICAL THIN FILMS 3 : NEW DEVELOPMENTS

publisher

  • SPIE - INT SOC OPTICAL ENGINEERING

start page

  • 8

end page

  • 18

volume

  • 1323