URBAN, FK, HOSSEINITEHRANI, A, FENG, SW
et al. (1993). SELECTIVE-AREA DEPOSITION OF METAL-FILMS BY THE IONIZED CLUSTER BEAM METHOD
.
APPLIED PHYSICS LETTERS, 62(24), 3117-3119. 10.1063/1.109155
URBAN, FK, HOSSEINITEHRANI, A, FENG, SW et al. (1993). SELECTIVE-AREA DEPOSITION OF METAL-FILMS BY THE IONIZED CLUSTER BEAM METHOD
. APPLIED PHYSICS LETTERS, 62(24), 3117-3119. 10.1063/1.109155