SELECTIVE-AREA DEPOSITION OF METAL-FILMS BY THE IONIZED CLUSTER BEAM METHOD Article

URBAN, FK, HOSSEINITEHRANI, A, FENG, SW et al. (1993). SELECTIVE-AREA DEPOSITION OF METAL-FILMS BY THE IONIZED CLUSTER BEAM METHOD . APPLIED PHYSICS LETTERS, 62(24), 3117-3119. 10.1063/1.109155

keywords

  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology

Digital Object Identifier (DOI)

publisher

  • AMER INST PHYSICS

start page

  • 3117

end page

  • 3119

volume

  • 62

issue

  • 24