OPTICAL-PROPERTIES OF REACTIVE ICB ALUMINUM-OXIDE FILMS DEPOSITED ON SI(100) Article

URBAN, FK, LEVENSON, LL, HASHIMOTO, H et al. (1988). OPTICAL-PROPERTIES OF REACTIVE ICB ALUMINUM-OXIDE FILMS DEPOSITED ON SI(100) . APPLIED SURFACE SCIENCE, 33-4 966-971. 10.1016/0169-4332(88)90405-9

cited authors

  • URBAN, FK; LEVENSON, LL; HASHIMOTO, H; USUI, H; YAMADA, I; TAKAGI, T

sustainable development goals

authors

publication date

  • September 1, 1988

published in

keywords

  • Chemistry
  • Chemistry, Physical
  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE BV

start page

  • 966

end page

  • 971

volume

  • 33-4