PROCESS ANALYSIS OF THIN-FILM DEPOSITION WITH AN INSITU ELLIPSOMETER Other Scholarly Work

SAVRDA, S, HIMEL, MD, GUENTHER, KH et al. (1990). PROCESS ANALYSIS OF THIN-FILM DEPOSITION WITH AN INSITU ELLIPSOMETER . 1166 346-354.

cited authors

  • SAVRDA, S; HIMEL, MD; GUENTHER, KH; URBAN, FK

authors

publication date

  • January 1, 1990

keywords

  • Optics
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology

Location

  • CA, SAN DIEGO

publisher

  • SPIE - INT SOC OPTICAL ENGINEERING

start page

  • 346

end page

  • 354

volume

  • 1166