ELLIPSOMETRY ALGORITHM FOR ABSORBING FILMS Article

URBAN, FK. (1993). ELLIPSOMETRY ALGORITHM FOR ABSORBING FILMS . APPLIED OPTICS, 32(13), 2339-2344. 10.1364/AO.32.002339

keywords

  • ABSORBING FILM OPTICAL PROPERTIES
  • ELLIPSOMETRY ALGORITHM
  • ELLIPSOMETRY COMPUTATIONS
  • INVERSION
  • MULTIPLE-ANGLE ELLIPSOMETRY
  • OPTICAL-CONSTANTS
  • Optics
  • Physical Sciences
  • Science & Technology
  • THICKNESS
  • THIN-FILMS

Digital Object Identifier (DOI)

publisher

  • OPTICAL SOC AMER

start page

  • 2339

end page

  • 2344

volume

  • 32

issue

  • 13