Investigations of Ar ion irradiation effects on nanocrystalline SiC thin films Conference

Craciun, V, Craciun, D, Socol, G et al. (2016). Investigations of Ar ion irradiation effects on nanocrystalline SiC thin films . APPLIED SURFACE SCIENCE, 374 339-345. 10.1016/j.apsusc.2015.12.130

International Collaboration

cited authors

  • Craciun, V; Craciun, D; Socol, G; Behdad, S; Boesl, B; Himcinschi, C; Makino, H; Socol, M; Simeone, D

sustainable development goals

authors

date/time interval

  • May 11, 2015 -

publication date

  • June 30, 2016

webpage

published in

keywords

  • AMORPHIZATION
  • Chemistry
  • Chemistry, Physical
  • DAMAGE
  • EVOLUTION
  • GRAZING-INCIDENCE
  • INDENTATION
  • LAYERS
  • Materials Science
  • Materials Science, Coatings & Films
  • Mechanical properties
  • PULSED-LASER DEPOSITION
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Pulsed laser deposition
  • RAMAN-SCATTERING
  • Radiation effect
  • SILICON-CARBIDE
  • Science & Technology
  • SiC thin films
  • Technology
  • ZRC

Location

  • Lille, FRANCE

Digital Object Identifier (DOI)

Conference

  • Symposium CC on Laser and Plasma Processing for Advanced Applications in Material Science held during the Annual Spring Meeting of the European-Materials-Research-Society (E-MRS)

publisher

  • ELSEVIER SCIENCE BV

start page

  • 339

end page

  • 345

volume

  • 374