Contact physics modeling and optimization design of RF-MEMS cantilever switches Conference

Wang, Z, Chow, L, Volakis, JL et al. (2005). Contact physics modeling and optimization design of RF-MEMS cantilever switches . 2015 IEEE INTERNATIONAL SYMPOSIUM ON ANTENNAS AND PROPAGATION & USNC/URSI NATIONAL RADIO SCIENCE MEETING, 1 A 81-84. 10.1109/APS.2005.1551248

cited authors

  • Wang, Z; Chow, L; Volakis, JL; Saitou, K; Kurabuyashi, K

authors

abstract

  • RF MEMS direct-contact switches exhibit many advantages over the conventional semiconductor switches; however, existing drawbacks such as low power handling, high pull-in voltage and long switch opening time are most critical. This paper presents an optimization design for RF-MEMS cantilever direct-contact switch to achieve maximum power handling capability, minimum pull-in voltage and switch opening time simultaneously. A 2-step optimization technique is proposed to achieve the optimal design to allow for a power handling capability of 130 mW, a pull-in voltage of 52 V, and a switch opening time 4.4 μs presented. The optimization results show that substantial room exists for improving the current designs of RF MEMS direct-contact switches. © 2005 IEEE.

publication date

  • December 1, 2005

published in

Digital Object Identifier (DOI)

International Standard Book Number (ISBN) 10

International Standard Book Number (ISBN) 13

start page

  • 81

end page

  • 84

volume

  • 1 A