Development of TiNi shape memory alloy film deposited by sputtering from separate Ti and Ni targets Conference

Ohta, A, Bhansali, S, Kishimoto, I et al. (1998). Development of TiNi shape memory alloy film deposited by sputtering from separate Ti and Ni targets . COMPRESSIVE SENSING III, 3512 138-145. 10.1117/12.324049

cited authors

  • Ohta, A; Bhansali, S; Kishimoto, I; Umeda, A

authors

date/time interval

  • September 21, 1998 -

publication date

  • January 1, 1998

webpage

published in

keywords

  • Engineering
  • Engineering, Multidisciplinary
  • Microscopy
  • Physical Sciences
  • Physics
  • Physics, Applied
  • SMA
  • Science & Technology
  • Technology
  • TiNi
  • shape memory alloy
  • thin film

Location

  • SANTA CLARA, CA

Digital Object Identifier (DOI)

International Standard Book Number (ISBN) 10

Conference

  • Materials and Device Characterization in Micromachining

publisher

  • SPIE-INT SOC OPTICAL ENGINEERING

start page

  • 138

end page

  • 145

volume

  • 3512