Piezoresistive MEMS pressure sensor and packaging for harsh oceanic environment Conference

Mohan, A, Malshe, AP, Aravamudhan, S et al. (2004). Piezoresistive MEMS pressure sensor and packaging for harsh oceanic environment . Proceedings - Electronic Components and Technology Conference, 948-950. 10.1109/ECTC.2004.1319452

cited authors

  • Mohan, A; Malshe, AP; Aravamudhan, S; Bhansali, S

authors

date/time interval

  • February 3, 2004 -

publication date

  • January 1, 2004

published in

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • Science & Technology
  • Technology

Location

  • NV, Las Vegas

Digital Object Identifier (DOI)

International Standard Book Number (ISBN) 10

Conference

  • 54th Electronic Components and Technology Conference

publisher

  • IEEE

start page

  • 948

end page

  • 950