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An Integrated Software Tool for Modeling and Model-Based Control Semiconductor Manufacturing Equipment.
Grant
An Integrated Software Tool for Modeling and Model-Based Control Semiconductor Manufacturing Equipment. .
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An Integrated Software Tool for Modeling and Model-Based Control Semiconductor Manufacturing Equipment. .
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Overview
Affiliation
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Overview
date/time interval
September 17, 2008 - May 31, 2009
awarded by
National Science Foundation
subcontracted through
SC Solutions Inc.
Funding Organization
administered by
Knight Foundation School of Computing and Information Sciences
sponsor award ID
Subcontract Agreement
Affiliation
contributor
Clarke, Peter
Co-Principal Investigator
He, Xudong
Principal Investigator