Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon
Article
Wang, C, Rabih, Z, Park, BY et al. (2008). Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon
. 13(2-4), 360-375. 10.1504/IJMTM.2008.016782
Wang, C, Rabih, Z, Park, BY et al. (2008). Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon
. 13(2-4), 360-375. 10.1504/IJMTM.2008.016782