Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors Article

Chen, Wei, Beidaghi, Majid, Penmatsa, Varun et al. (2010). Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors . IEEE TRANSACTIONS ON NANOTECHNOLOGY, 9(6), 734-740. 10.1109/TNANO.2010.2049500

cited authors

  • Chen, Wei; Beidaghi, Majid; Penmatsa, Varun; Bechtold, Kevin; Kumari, Latha; Li, WZ; Wang, Chunlei Peggy

sustainable development goals

authors

publication date

  • November 1, 2010

webpage

published in

keywords

  • Carbon microelectromechanical systems (C-MEMS)
  • DEPOSITION
  • ELECTROCHEMICAL CAPACITORS
  • ENERGY
  • Engineering
  • Engineering, Electrical & Electronic
  • FABRICATION
  • Materials Science
  • Materials Science, Multidisciplinary
  • Nanoscience & Nanotechnology
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • carbon nanotubes (CNTs)
  • on-chip supercapacitors

Digital Object Identifier (DOI)

publisher

  • IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

start page

  • 734

end page

  • 740

volume

  • 9

issue

  • 6